• Professor, Institute of Applied Mechanics, Nationl Taiwan University, present
• Associate Dean, Office of Research and Development, National Taiwan University, since August 2009
• Director, Center of Industrial-Academic Cooperation, National Taiwan University, since November 2009
• Consultant, Ministry of Economic Affairs, since January 2008
• Senior Researcher, National Applied Research Laboratories (2008.9-2009.4)
• Deputy Executive Secretary, Science and Technology Group, Executive Yuan (2005.8-2008.5)
• Director, NTU-ITRI Nanotechnology Center (2002.11-2005.7)

• 電子學實驗特論
• 電子學實驗

• Digital Modeling and Embedded Computing
• Industrial Sensor Technology

Journal Papers

1. F.C. Moon, K.-C. Weng, and P.-Z. Chang (1989), “Dynamic Magnetic Forces in Superconducting Ceramics”, J. Applied Physics, Vol. 66, pp. 5643-5645.
2. F.C. Moon and P.-Z. Chang (1990), “High-Speed Rotation of Magnets on High Tc Superconducting Bearings”, Applied Physics Letters, Vol. 56, pp. 397-399.
3. P.-Z. Chang, F.C. Moon, J.R. Hull, and T.M. Mulcahy (1990), “Levitation Force and Magnetic Stiffness in Bulk High-Temperature Superconductors”, J. Applied Physics, Vol. 67, pp. 4358-4360.
4. F.C. Moon, P.-Z. Chang, H. Hojaji, A. Barkatt, and A.N. Thorpe (1990), “Levation Force, Relaxation and Magnetic Stiffness of Melt-Quenched Yba₂Cu₃O_x”, Japanese J. Applied Physics, Vol. 29, pp. 1257-1258.
5. P.-Z. Chang, J.-H. Lee, S.-E. Hsu, and K.-L. Wang (1993), “Design of a Hybrid Superconducting Bearing Operated at 100,000 RPM between 10K and 77K”, Chinese Journal of Physics, Vol. 31, No.6, pp. 1115-1119. (SCI, EI)
6. Yu-Wen Hsu, Shey-Shi Lu, Lung-Jieh Yang, and Pei-Zen Chang (1995), “A Wide-G Range Silicon Piezoresistive Accelerometer”, Journal of the Chinese Institute of Engineers, Vol. 18, No. 6, pp. 873-878. (EI)
7. Ching-Liang Dai, Pei-Zen Chang, and Shui-Shomg Lu (1997), “Design and Processing of Integrated Micro Accelerometer Using Standard CMOS Process”, Journal of the Chinese Institute of Engineers, Vol. 20, No.1, pp. 47-55. (EI)
8. Ching-Liang Dai, Pei-Zen Chang, and Jiann-Jenn Wang (1997), “Design and Fabrication of Micro Sensors Using Standard CMOS IC Process”, Journal of the Chinese Institute of Mechanical Engineers, Vol. 18, No.3, pp. 283-291 (EI)
9. Lung-Jieh Yang, Chen-Chia Chiang, and Pei-Zen Chang (1997), ”The Application of V-Groove Slot Array Method to the Piezoresistive Pressure Sensors”, Journal of the Chinese Institute of Engineers, Vol. 20, No.3, pp. 335-341. (EI)
10. Ching-Liang Dai and Pei-Zen Chang (1997), “In-situ Micro Strain Gauges for Measuring Residual Strain of Three CMOS Thin Films Using Only One Maskless Post-processing Step”, Journal of the Chinese Institute of Engineers, Vol. 20, No.5, pp. 539-548. (EI)
11. C.K. Lee, S.H. Chang, and P.Z. Chang (1998), “Miniature Piezoelectric Actuators: Design Concept, Fabrication, and Performance Evaluation”, Smart Materials and Structures, Vol. 7, pp. 312-326. (EI)
12. Pei-Zen Chang and Lung-Jieh Yang (1998), “A Method Using V-Groove to Monitor the Thickness of Silicon Membrane with Micrometer Resolution”, Journal of Micromechanics and Microengineering, Vol. 8, pp. 182-187. (SCI, EI)
13. Peizen Chang, Chienliu Chang, and Kaihsiang Yen (1998), “Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors”, Journal of Intelligent Material Systems and Structures, Vol. 9, pp. 95-103. (SCI, EI)
14. Yu-Wen Hsu, Shey-Shi Lu, and Pei-Zen Chang (1999), “Piezoresistive Response Induced by Piezoelectric Charges in n-type GaAs Mesa Resistors for Application in Stress Transducer”, Journal of Applied Physics, Vol. 85, No.1, pp. 333-340. (SCI, IF=2.316, EI)
15. Yo-Sheng Lin, Shey-Shi Lu, and Pei-Zen Chang (1999), “Ga_0.51In_0.49P/In_xGa_1-xAs/GaAs Lattice-Matched and Strained Doped-Channel Field-Effect-Transistors Grown by Gas-Source Molecular-Beam-Epitaxy”, Journal of Applied Physics, Vol. 85, No.4, pp. 2197-2201. (SCI, IF=2.316, EI)
16. Yo-Sheng Lin, Shey-Shi Lu, Lan-Hai, and Pei-Zen Chang (1999), “S-Band MMIC Amplifier Using Ga_0.51In_0.49P/GaAs MISFET’s as Active Devices”, Microwave and Optical Technology Letters, Vol. 20, pp. 188-190. (SCI, IF=0.568, EI)
17. Lungjieh Yang, Kuangyeh Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang, and Pei-Zen Chang (1999), “Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process”, Sensors and Materials, Vol. 11, pp. 359-367. (EI, IF=0.585)
18. Ching-Liang Dai and Pei-Zen Chang (1999), “A CMOS Surface Micromachined Pressure Sensor”, Journal of the Chinese Institute of Engineers, Vol. 22, pp. 375-380. (EI, IF=0.190)
19. Chienliu Chang and Peizen Chang (2000), “Innovative Micromachined Microwave Switch with Very Low Insertion Loss”, Sensors and Actuators A, Vol. 79, pp. 71-75. (SCI, IF=1.434, EI)
20. Chienliu Chang, Ching-Liang Dai, Jenn-Yi Chen, Honglin Chen, Kaihsiang Yen, Jing-Hung Chiou and Pei-Zen Chang (2000), “A Wideband Electrostatic Microwave Switch Fabricated by Surface Micromachining”, Journal of the Chinese Institute of Engineers, Vol. 23, pp. 781-787. (EI, IF=0.190)
21. Lungjieh Yang, Tsungwei Huang and Pei-Zen Chang (2001), “CMOS Microelectromechanical Bandpass Filters”, Sensors and Actuators A, Vol. 90, pp. 148-152. (SCI, IF=1.434,EI)
22. Ching-Liang Dai, Hung-Lin Chen and Pei-Zen Chang (2001), “Fabrication of a Micromachined Optical Modulator Using the CMOS Process”, J. Micromechanics and Microengineering, Vol. 11, pp. 612-615. (SCI, IF=2.343, EI)
23. Lung-Jieh Yang, Chih-Wei Liu, and Pei-Zen Chang (2001), “Phase Synchronization of Micro Mirror Arrays Using Elastic Linkages”, Sensors and Actuators A, Vol. 95, pp. 55-60. (SCI, IF=1.434,EI)
24. Ching-Liang Dai, Kaihsiang Yen and Pei-Zen Chang (2001), “Applied Electrostatic Parallelogram Actuators for Microwave Switches using the Standard CMOS Process”, J. Micromechanics and Microengineering, Vol. 11, pp. 697-702. (SCI, IF=2.321, EI)
25. Ching-Liang Dai, Hong-Lin Chen, Liang-Bin Yu, Chun-Hui Lin, and Pei-Zen Chang (2001), “Design and Fabrication of CMOS Optical Modulator”, Sensors and Actuators A, Vol. 95, pp. 69-74. (SCI, IF=1.434, EI)
26. Ching-Liang Dai, Hung-Lin Chen, Chi-Yuan Lee, and Pei-Zen Chang (2002), “Fabrication of Diffractive Optical Elements Using the CMOS Process”, J. Micromechanics and Microengineering, Vol. 12, pp. 21-25. (SCI, IF=2.321, EI)
27. Ching-Liang Dai, Chien-Liu Chang, Hung-Lin Chen, and Pei-Zen Chang (2002), “Fabrication of the Planar Angular Rotator Using the CMOS Process”, J. Micromechanics and Microengineering, Vol. 12, pp. 247-251. (SCI, IF=2.321, EI)
28. Jen-Yi Chen, Long-Sun Huang, Chia-Hua Chu, and Pei-Zen Chang (2002), “A New Transferred Ultra-thin Silicon Micropackaging”, J. Micromechanics and Microengineering, Vol. 12, pp. 406-409. (SCI, IF=2.321, EI)
29. T.-T. Wu, S.-M. Wang, Y.-Y. Chen, T.-Y. Wu, P.-Z. Chang, L.-S. Huang, C.-L. Wang, C.-W. Wu, and C.-K. Lee (2002), “Inverse Determination of Coupling of Modes Parameters of Surface Acoustic Wave Resonators”, Jap. J. Appl. Phys., Part I, Vol. 41, pp. 6610-6615. (SCI, IF=1.222, EI)
30. Ching-Liang Dai, Shih-Chen Chang, Chi-Yuan Lee, Ying-Chou Cheng, Chien-Liu Chang, Jing-Hung Chiou, and Pei-Zen Chang (2003), “Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS Process”, Journal of the Chinese Institute of Engineers, Vol. 26, No.2, pp. 237-241. (SCI, IF:0.190, EI)
31. Chih-Kung Lee, Wen-Jong Wu, Pei-Zen Chang, Long-Sun Huang, and Shu-Sheng Lee (2003), “System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University”, IEICE Trans. On Electronics, Vol. E86-C, No. 6, pp. 979-987. (SCI, IF=0.508, EI)
32. Chi-Yuan Lee, Ying-Chou Cheng, Yung-Yu Chen, Pei-Zen Chang, Tsung-Tsong Wu, Ping-Hei Chen, Wen-Jong Chen and, Shih-Yung Pao (2004), “In Situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a Surface Acoustic Wave Sensor”, Jap. J. Appl. Phys., Part I, Vol. 43, No. 6A, pp. 3611-3617. (SCI, IF=1.222, EI)
33. Ching-Liang Dai, Fu-Yuan Xiao, Chi-Yuan Lee, Ying-Chou Cheng, Pei-Zen Chang, and Shuo-Hung Chang (2004), “Thermal effects in PZT: diffusion of titanium and recrystallization of platinum”, Materials Science & Engineering A, Vol. 384, pp. 57-63. (SCI, IF=1.490, EI)
34. Chi-Yuan Lee, Ying-Chou Cheng, Yung-Yu Chen, Pei-Zen Chang, Ching-Liang Dai, Ping-Hei Chen, Shih-Yung Pao and Wen-Jong Chen (2004), “A Novel Method for Measuring the Thickness of Quartz using a Plate Wave Sensor”, Journal of the Chinese Society of Mechanical Engineers, Vol. 25, No. 4, pp. 321-328. (EI)
35. Y.-J. Yang, T.-H. Tsai and P.-Z. Chang, (2004), “Performance Study of a Micro Plasma Switch”, Journal of the Chinese Society of Mechanical Engineers, Vol. 25, No. 6, pp. 475-484. (EI)
36. Ying-Chou Cheng, Ching-Liang Dai, Chi-Yuan Lee, Ping-Hei Chen, Pei-Zen Chang (2005), “A circular micromirror array fabricated by a maskless post-CMOS process”, Microsystem Technologies, Vol. 11, No. 6, pp. 444-451. (SCI, IF=0.673, EI)
37. Ying-Chou Cheng, Ching-Liang Dai, Chi-Yuan Lee, Ping-Hei Chen and Pei-Zen Chang (2005), “A MEMS micromirror fabricated using CMOS post-process”, Sensors and Actuators A: Physical, Vol. 120, Issue 2, pp. 573-581. (SCI, IF=1.434, EI)
38. Chi-Yuan Lee, Pei-Zen Chang, Yung-Yu Chen, Ching-Liang Dai, Ping-Hei Chen and Shuo-Jen Lee (2005), “Novel Method for in situ Monitoring of Thickness of Quartz during Wet Etching”, Japanese Journal of Applied Physics, Vol. 44, No. 10, pp. 7662-7666. (SCI, IF=1.222, EI)
39. Tsung-Tsong Wu, Yung-Yu Chen, Guo-Tsai Huang, Pei-Zen Chang (2006), “Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers”, Journal of Applied Physics, Vol. 97, pp. 073510.1-073510.5. (SCI, IF=2.316, EI)
40. Chi-Yuan Lee, Pei-Zen Chang, Yung-Yu Chen, Ching-Liang Dai, Xuan-Yu Wang, Ping-Hei Chen and Shuo-Jen Lee (2006), “Novel Method for In-Situ Monitoring of Thickness of Silicon Wafer during Wet Etching”, Sensors and Materials, Vol. 18, No. 2, pp. 071-082. (SCI, IF=0.585, EI)
41. Chia-Hua Chu, Wen-Pin Shih, Sheng-Yuan Chung, Hsin-Chang Tsai, Tai-Kang Shing and Pei-Zen Chang (2007), “A low actuation voltage electrostatic actuator for RF MEMS switch applications”, Journal of Micromechanics and Microengineering, Vol.17, pp. 1649-1656. (SCI, IF=2.321, EI)
42. Yuh-Chung Hu, Pei-Zen Changand Wan-Chun Chuang (2007), “An approximate analytical solution to the pull-in voltage of a micro bridge with an elastic boundary,” Journal of Micromechanics and Microengineering, Vol.17, pp. 1870-1876. (SCI, IF=2.321, EI)
43. X. Y. Wang, C. Y. Lee, C. J. Peng, P. Y. Chen, and P. Z. Chang (2008), “A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method,“ Sensors and Actuators A: Physical, Vol. 143, pp. 469-474.(SCI, IF=1.434, EI)
44. Xuan-Yu Wang, Chi-Yuan Lee, Yuh-Chung Hu, Wen-Pin Shih, Chih-Cheng Lee, Jung-Tang Huangand Pei-Zen Chang (2008), “The Fabrication of silicon-based PZT microstructures using aerosol deposition method,” Journal of Micromechanics and Microengineering, Vol. 18, No. 5, 055034 (7pp). (SCI, IF=2.321, EI)
45. Wen-Pin Shih, Sheng-Yuan Chung, Yu-Yin Chen, Wen-Jong Wu, and Pei-Zen Chang (2008), “Tunable capacitor based on polymer-dispersed liquid crystal for power harvesting microsystems,”IEEE Transactions on Electron Devices, Vol. 55, pp. 2568-2573. (SCI, IF=2.165, EI)
46. Chi-Ming Fang, Shih-Yung Pao, Chi-Yuan Lee, Yi-Chang Lu, Pei-Yen Chen, Yung-Chung Chin and Pei-Zen Chang (2009), “Development of 2.4-GHz film bulk acoustic wave filter for wireless communication,” Journal of Micro/Nanolithography, MEMS and MOEMS(JM3), Vol. 8(2), pp. 021121-1~7. (SCI, IF=1.243, EI)
47. B S Lee, S C Lin, W J Wu, X Y Wang, P Z Chang and C K Lee (2009), “Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film,” Journal of Micromechanics and Microengineering, Vol. 19, 065014 (8pp), (SCI, EI)
48. Wan-Chun Chuang, Yuh-Chung Hu, Chi-Yuan Lee, Wen-Pin Shih and Pei-Zen Chang (2009), “Electromechanical behavior of the curled cantilever beam,” Journal of Micro/Nanolithography, MEMS, and MOEMS Scope, Vol. 8(3), pp. 033020-1~8. (SCI, EI)
49. Yi-Jie Chen, Wen-Pin Shih, Cheng-Kai Kao, and Pei-Zen Chang (2010), “Design and Fabrication of a Tunable Suerconductive Resonator Utilizing Micromachined Tunable Capacitor,” Journal of Microelectromechanical Systems, Vol. 19, No. 1, pp.129-136. (SCI, EI)

1. 邱景宏、林宗輝、張培仁、謝光宇、呂春福、王紀雯(2000)，”微電感之製造方法及其構造”，中華民國專利發明第114793號。(2005/04/01停止維護)
2. 張建六、張培仁(2001)，“微波開關及其製造方法”，中華民國專利發明第127763號。
3. 李世光、吳乾琦、張培仁(2001)，“一種結合兩道同調光束利用干涉進行多次直接曝光以定義圖樣的製程技術”，中華民國專利發明第141263號。(2002/07/11停止維護)
4. 王紀雯、呂春福、林宗輝、謝光宇、張培仁、邱景宏(2001)，“微變壓器”，中華民國專利新型第182631號。(2002/11/01停止維護)
5. 張培仁、邱景宏、戴慶良(2001)，”量測薄膜之楊氏係數的方法及其裝置”，中華民國專利發明第142448號。(2002/10/01停止維護)
6. 黃宗偉、張培仁、邱景宏(2002)，”以標準CMOS製程製作微機械式濾波器之方法及其成品”，中華民國專利發明第163094號。(2006/08/11停止維護)
7. 張培仁、邱景宏、張世臣(2002) “微電感之製造方法及其構造”，中華民國專利發明第168011號。(2005/11/21停止維護)
8. 張培仁、呂誌展、鄭英周(2003)，”量測材料卜松比的方法”，中華民國專利發明第174943號。(2006/03/21停止維護)
9. 張培仁、黃榮堂、林弘萱(2003)，”微機電技術製作積體多頻通訊被動元件”，中華民國專利發明第174868號。
10. 張培仁、鄭英周、李其源(2003)，”積體電路及其製作方法”，中華民國專利發明第193171號。
11. 黃榮堂、李昇鴻、簡昭珩、張培仁(2003)，”以標準積體電路製程製作微型開關”，中華民國專利發明第193588號。
12. Pei-Zen Chang, Jung-Tang Huang, and Hung-Hsuan Lin, “Micro-Electromechnical Process For Fabrication of Integrated Multi-Frequency Communication Passive Components”, U.S.Patent No. 6,607,934 (August 19, 2003)
13. 張培仁、李其源、吳政忠、陳永裕、鮑世勇、鄭英周、陳炳煇、顏凱翔(2004)，”濕蝕刻壓電材料之厚度即時監控方法”，中華民國專利發明第206714號。
14. 張培仁、李其源、吳政忠、陳永裕、鄭英周、鮑世勇、陳炳煇、顏凱翔(2004)，”溼蝕刻矽薄膜之厚度即時監控方法”，中華民國專利發明第205260號。
15. 林啟萬、李舒昇、黃振剛、李世光、張培仁、林世明(2004)，”改變表面漸逝波共振狀況之對稱與不對稱奈米複層膜結構”，中華民國專利發明第203961號。
16. 季君炎、張培仁、王宣又(2004)，”表面聲波元件與積體電路之整合技術”，中華民國專利發明第201583號。(2005/04/10停止維護)
17. 林啟萬、黃啟裕、邱志鵬、劉盈村、薛順成、郭德盛、黃榮山、張培仁、楊龍杰、吳造中、林世明、李世光(2004)，”表面電漿子共振感測系統及方法”，中華民國專利發明第204996號。
18. 黃榮堂、李承曄、簡昭珩、張培仁(2004)，”高變化率的接觸型可變電感”，中華民國專利發明第I224344號。
19. Chii-Wann Lin, Chen Kung Huang, Shiming Lin, Chih Kung Lee, Peizen Chang, ShuSheng Lee, “Repeated Structure of Nanometer Thin Films with Symmetric or Asymmetric Configuration for SPR Signal Modulation”,U.S. Patent No. 6,870,237(March 22, 2005)
20. 黃榮堂、陳俊志、簡昭珩、張培仁(2006)，”高變化率的外引線式接觸型可變電感”，中華民國專利發明第I248194號。
21. 張培仁、鄭英周、李其源(2006)，”以半導體製程技術製作之微機電光學切換裝置及其製造方法”，中華民國專利發明第I255254號。
22. 謝國煌、黃榮山、楊申語、王大銘、張培仁、張致遠、陳偉源(2006)，”用於光電製程之微轉印方法”，中華民國專利發明第I252181號。
23. 林啟萬、張培仁、趙福杉、楊燿州、王俊民(2006)，”具有電極保護薄膜之生醫感測器及其製作方法”，中華民國專利發明第I262070號。
24. 楊燿州，黃國修，林啟萬，楊龍杰，趙福杉，李世光，張培仁，黃瀅瑛(2006)，”微流體混合元件之類魚脊結構”，中華民國專利發明第M297788號。
25. Po-Hsun Sung, Pei-Yen Chen, Yung-Chung Chin, Pei-Zen Chang, Yen-Ming Pang, Chi-Ming Fang, Chun-Li Hou, “Method of Forming Film Bulk Acoustic Wave Filter Assembly”, U.S. Patent No. US 7,214,564. (May 8, 2007)
26. 陳永裕、吳政忠、黃國財、張培仁(2008)，”表面聲波式薄膜量測裝置與量測方法”，中華民國專利發明第I294520號”。
27. 黃榮堂、李承曄、簡昭珩、張培仁(2008), “微機電高可變電容與可變電感組成的多頻可調式相移器”，中華民國專利發明第I292965號。
28. Yung-Yu Chen, Tsung-Tsong Wu, Guo-Tsai Huang, Pei-Zen Chang, “Method for Determining Properties of A Film, and Apparatus for Realizing the Method,” U.S. 7,350,416. (April 1, 2008)
29. 林嘉宇、鄭志強、李世光、吳文中、陳俊杉、張培仁(2009)，”超音波測距感測器總成及其超音波測距感測器”，中華民國專利發明第I329585號。