Recently, Prof. Wei-Chang Li research group has published a paper on CMOS-MEMS resoswitches in the leading MEMS journal IEEE Journal of Microelectromechanical Systems (JMEMS). This study develops a nonlinear dynamic model for MEMS resonant switches (“resoswitches”) that captures coupled vibration, contact, and conduction behaviors. The model integrates Duffing/van der Pol nonlinearities, a generalized DMT framework for surface interaction forces, and a contact-resistance analysis under thermal switching. Experimental validation is performed on a comb-drive, folded-beam resoswitch using both frequency- and time-domain measurements. The results clarify how contact effects shape the output waveform and overall switching performance, providing practical guidance for developng MEMS resoswitches and generic vibro-impact MEMS devices.

This paper has been featured as the JMEMS Right Now and cover paper.

More information:
C.-P. Tsai and W.-C. Li, “CMOS-MEMS Resoswitches—Design, Modeling, and Characterization,” IEEE J. Microelectromech. Syst. (JMEMS), vol. 34, no. 6, pp. 730-743, Dec. 2025.
https://doi.org/10.1109/JMEMS.2025.3607167