changpz@mems.iam.ntu.edu.tw

 應力所417室

 02-3366-5652

 02-2363-9290

• PhD (Theoretical & Applied Mechanics), Cornell University, 1991
• BE (Civil Engineering), National Taiwan University, 1984

• Professor, Institute of Applied Mechanics, Nationl Taiwan University, present
• joined the faculty of the Institute of Applied Mechanics, National Taiwan University in 1991

• 微機電系統
• 電磁機械系統
• 超導體力學

• 中國工程師學會九十三年度傑出工程教授獎
• “Mechanical Behavior of RF MEMS,” Second International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems, Chiba University, Japan (2004)
• “RF MEMS Research Activities in Taiwan,” Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT MNT 2004), Sapporo, Japan (2004)
  

• 電子學實驗特論
• 電子學實驗

  Journal Papers

• Ching-Liang Dai, Hung-Lin Chen, Chi-Yuan Lee, and Pei-Zen Chang (2002), “Fabrication of Diffractive Optical Elements Using the CMOS Process”, J. Micromechanics and Microengineering, Vol. 12, pp. 21-25. (SCI, IF=1.699, EI)
• Ching-Liang Dai, Chien-Liu Chang, Hung-Lin Chen, and Pei-Zen Chang (2002), “Fabrication of the Planar Angular Rotator Using the CMOS Process”, J. Micromechanics and Microengineering, Vol. 12, pp. 247-251. (SCI, IF=1.699, EI)
• Jen-Yi Chen, Long-Sun Huang, Chia-Hua Chu, and Pei-Zen Chang (2002), “A New Transferred Ultra-thin Silicon Micropackaging”, J. Micromechanics and Microengineering, Vol. 12, pp. 406-409. (SCI, IF=1.699, EI)
• T.-T. Wu, S.-M. Wang, Y.-Y. Chen, T.-Y. Wu, P.-Z. Chang, L.-S. Huang, C.-L. Wang, C.-W. Wu, and C.-K. Lee (2002), “Inverse Determination of Coupling of Modes Parameters of Surface Acoustic Wave Resonators”, Jap. J. Appl. Phys., Part I, Vol. 41, pp. 6610-6615. (SCI, IF=1.171, EI)
• Ching-Liang Dai, Shih-Chen Chang, Chi-Yuan Lee, Ying-Chou Cheng, Chien-Liu Chang, Jing-Hung Chiou, and Pei-Zen Chang (2003), “Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS Process”, Journal of the Chinese Institute of Engineers, Vol. 26, No.2, pp. 237-241. (SCI, IF:0.295, EI)
• Chih-Kung Lee, Wen-Jong Wu, Pei-Zen Chang, Long-Sun Huang, and Shu-Sheng Lee (2003), “System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University”, IEICE Trans. On Electronics, Vol. E86-C, No. 6, pp. 979-987. (SCI, IF=0.53, EI)
• Chi-Yuan Lee, Ying-Chou Cheng, Yung-Yu Chen, Pei-Zen Chang, Tsung-Tsong Wu, Ping-Hei Chen, Wen-Jong Chen and, Shih-Yung Pao (2004), “In-situ Monitoring of Silicon Membrane Thickness during Wet Etching using a SAW Sensor”, Jap. J. Appl. Phys., Part I, Vol. 43, No.6A, pp. 3611-3617. (SCI, IF=1.171, EI)
• Ching-Liang Dai, Fu-Yuan Xiao, Chi-Yuan Lee, Ying-Chou Cheng, Pei-Zen Chang, and Shuo-Hung Chang (2004), “Thermal effects in PZT: diffusion of titanium and recrystallization of platinum”, Materials Science & Engineering A, Vol. 384, pp. 57-63. (SCI, IF=1.365, EI)
• Ying-Chou Cheng, Ching-Liang Dai, Chi-Yuan Lee, Ping-Hei Chen, Pei-Zen Chang (2004), “A circular micromirror array fabricated by a maskless post-CMOS process”, Microsystem Technologies, pp.444-451. (SCI, IF=0.707, EI)
• Chi-Yuan Lee, Ying-Chou Cheng, Yung-Yu Chen, Pei-Zen Chang, Ching-Liang Dai, Ping-Hei Chen, Shih-Yung Pao and Wen-Jong Chen (2004), “A Novel Method for Measuring the Thickness of Quartz using a Plate Wave Sensor”, Journal of the Chinese Society of Mechanical Engineers, Vol. 25, No. 4, pp. 321-328. (EI)
• Ying-Chou Cheng, Ching-Liang Dai, Chi-Yuan Lee, Ping-Hei Chen and Pei-Zen Chang (2005), “A MEMS micromirror fabricated using CMOS post-process”, Sensors and Actuators A: Physical, Vol. 120, Issue 2, pp. 573-581. (SCI, IF=1.422, EI)
• Chi-Yuan Lee, Pei-Zen Chang, Yung-Yu Chen, Ching-Liang Dai, Ping-Hei Chen and Shuo-Jen Lee (2005), “Novel Method for in situ Monitoring of Thickness of Quartz during Wet Etching”, Japanese Journal of Applied Physics, Vol. 44, No. 10, pp.7662-7666. (SCI, IF=1.142, EI)
• Chi-Yuan Lee, Pei-Zen Chang, Yung-Yu Chen, Ching-Liang Dai, Xuan-Yu Wang, Ping-Hei Chen and Shuo-Jen Lee (2006), “Novel Method for In-Situ Monitoring of Thickness of Silicon Wafer during Wet Etching”, Sensors and Materials, Vol. 18, No. 2, pp.071-082. (EI, IF=0.738)
• Y.-J. Yang, T.-H. Tsai and P.-Z. Chang, (2005), “Performance Study of a Micro Plasma Switch”, Journal of Chinese Mechanical Engineering, (EI) (to appear)
  

• S.C. Tsai, T.K. Tseng, Y.L. Song, Y.F. Chou, C.S. Tsai, and P.Z. Chang (2002), “Modeling and simulation of a high frequency MEMS-fabricated ultrasonic nozzle,” Proc. MRS Meeting, pp. 221-227, San Francisco, USA.
• 吳志偉、黃榮山、張培仁、張所鋐(2002)，“厚植國防與科技實力-國科會北區微機電系統研究中心與發展成果”，第十一屆國防科技學術研討會，桃園，台灣。
• 陳文中、李世光、呂秀雄、李其源、張培仁 (2003)，“ 微機電元件非均質輪廓顯微量測系統之研製”，第三屆海峽兩岸製造科技研討會，pp. 40-46，台北，台灣。
• Chia-Hua Chu, Long-Sun Huang, Jen-Yi Chen, I-Lien Lee, and Peizen Chang (2003), “A New Integration of Device-Scale Micropackaging with Bi-directional Tunable Capacitors,” Proc. IEEE 16th Annual Conf. Micro Electro Mechanical Systems (MEMS 2003), pp. 654-657, Kyoto, Japan.
• Chi-Yuan Lee, Tsung-Tsong Wu, Yung-Yu Chen, Shih-Yung Pao, Wen-Jong Chen, Ying-Chou Cheng, Pei-Zen Chang, Ping-Hei Chen, Chih-Kung Lee, Ching-Liang Dai, Lung-Jieh Yang, Kaih-Siang Yen, Fu-Yuan Xiao, Chih-Wei Liu, and Shui-Shong Lu (2003), “In-situ Monitoring of Thickness of Quartz Membrane during Batch Chemical Etching Using a Novel Micromachined Acoustic Wave Sensor,” IEEE International Frequency Control Symposium and PDA Exhibition and 17th European Frequency and Time Forum, pp. 993-1000, Tampa Florida, USA.
• Shih-Yung Pao, Zuoqing Wang, Zi-Neng Huang, Min-Chiang Chao, C.S. Lam, and Pei-Zen Chang (2003), “Characteristics of the Unique Modes in HBARS,” IEEE International Frequency Control Symposium and PDA Exhibition and 17th European Frequency and Time Forum, pp. 785-793, Tampa Florida, USA.
• Ying-Chou Cheng, Chi-Yuan Lee, Pei-Zen Chang and Ping-Hei Chen (2003), “CMOS-MEMS微光通訊被動元件之研製” 第三屆精密機械製造研討會，pp. 282-289，高雄，台灣。
• Chi-Yuan Lee, Tsung-Tsong Wu, Yung-Yu Chen, Ying-Chou Cheng, Shih-Yung Pao, Wen-Jong Chen, Pei-Zen Chang, Ping-Hei Chen, Kai-Hsiang Yen, and Fu-Yuan Xiao (2003), “A Novel Method for Evaluating the Thickness of Silicon Membrane Using a SAW Sensor,” 第七屆奈米工程暨微系統技術研討會，pp. 191-195，台北，台灣。
• Ying-Chou Cheng, Chi-Yuan Lee, Wen-Jong Chen, Ching-Liang Dai, Pei-Zen Chang and Ping-Hei Chen (2003),, “Design and fabrication of a free-space micro-optical bench based on CMOS-MEMS process,” 第七屆奈米工程暨微系統技術研討會，pp. 171-174，台北，台灣。
• Chi-Yuan Lee, Tsung-Tsong Wu, Yung-Yu Chen, Shih-Yung Pao, Ying-Chou Cheng, Wen-Jong Chen, Pei-Zen Chang, Ping-Hei Chen, Kai-Hsiang Yen and Fu-Yuan Xiao (2003), “A Novel Method for Evaluation the Thickness of Quartz Membrane using a SAW Sensor,” 第二十屆機械工程研討會，pp. 1229-1236，台北，台灣。
• Ying-Chou Cheng, Chi-Yuan Lee, Wen-Jong Chen, Ching-Liang Dai, Pei-Zen Chang and Ping-Hei Chen (2003), “微型光通訊元件之設計和製作” 第二十屆機械工程研討會，pp. 73-79，台北，台灣。
• Shu-Cheng Yang, Kuo-Hsiu Huang, Kuo-Yeh Shen, Yao-Joe Yang, and Pei-Zen Chang (2003), “Miniaturization and Design of a High-Speed Plasma Switch,” Proc. 7th Intl. Conf. Mechatronics Technology, pp. 319-323, Taipei, Taiwan.
• H.H. Lin, C.H. Chu, C.L. Chang, and P.Z. Chang (2004), “Mechanical Behavior of RF MEMS,” Second International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems, pp. 121-125, Chiba University, Japan. (Invited Talk)
• Chi-Yuan Lee, Pei-Zen Chang, Tsung-Tsong Wu, Yung-Yu Chen, Ying-Chou Cheng, Wen-Jong Chen, Shih-Yung Pao, Ping-Hei Chen, Kai-Hsiang Yen and Fu-Yuan Xiao (2004), “ In-situ monitoring of silicon membrane thickness during batch chemical etching using a novel micromachined acoustic wave sensor, ” The 1st International Symposium on Micro & Nano Technology, Honolulu, pp. I-2-02 (PDF file without page number), Hawaii, USA.
• Ying-Chou Cheng, Chi-Yuan Lee, Wen-Jong Chen, Ching-Liang Dai, Pei-Zen Chang and Ping-Hei Chen (2004), “ Fabrication of the free space optical switch array using the CMOS process, ” The 1st International Symposium on Micro & Nano Technology, pp. I-2-01 (PDF file without page number), Honolulu, Hawaii, USA.
• Wen-Jong Chen, Chi-Yuan Lee, Ying-Chou Cheng, Chih-Kung Lee and Pei-Zen Chang (2004), “ Inhomogeneous profile measurement of microsystem by a multi-functional microscope, ” The 1st International Symposium on Micro & Nano Technology, pp. XVII-3-02 (PDF file without page number), Honolulu, Hawaii, USA.
• 林弘萱、朱家驊、張建六、張培仁 (2004)，”Analysis of Electromechanical Behavior of RF MEMS Switches”，第十二屆非破壞檢測技術研討會，pp. 1-10，南投，台灣。(Keynote Speech)
• F. Y. Xiao, Y. Z. Juang, C. F. Chiu, C. Y. Lee, P. Z. Chang, C. H. Tu and R. L. Wang (2004), “ Improved CMOS MEMS process and CMOS compatibility test, ” IEEE Symposium on Design, Test, Integration and Packaging of MEMS/ MOEMS, pp. 339-342, Montreux, Switzerland.
• H.H. Lin, S.Y. Pao and P.Z. Chang (2004), “RF MEMS Research Activities in Taiwan,” Proc. Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp. 378-383, Sapporo, Japan. (Invited Talk)
• C.C. Lu, Y.C. Cheng and P.Z. Chang (2004), “A New Test Structure to Determine the Poisson's Ratio of Thin Films Using Resonant Method, ” Proc. Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp. 525-528, Sapporo, Japan.
• P.H. Sung, C.Y. Chung, P.Y. Chen, P.Z. Chang, T.K. Wan and K.W. Wan (2004), “An innovative frequency-trimming technique for manufacturing FBAR,” Proc. Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp. 389-393, Sapporo, Japan.
• C.Y. Lee, P.Z. Chang, T.T. Wu, Y.Y. Chen, Y.C. Cheng, X.Y. Wang, W.J. Chen, S.Y. Pao, P.H. Chen, F.Y. Xiao and K.H. Yen (2004), “ Processing of Li-doped ZnO Piezoelectric Films on Silicon for Surface Acoustic Wave Sensor Application,” Proc. Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp. 719-724, Sapporo, Japan.
• Y.C. Cheng, C.L. Dai, C.Y. Lee, P.Z. Chang and P.H. Chen (2004), “Fabrication of MEMS Mirror Switches by the Standard CMOS Process,” Proc. Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp. 945-950, Sapporo, Japan.
• Chi-Yuan Lee, Tsung-Tsong Wu, Yung-Yu Chen, Ying-Chou Cheng, Wen-Jong Chen, Shih-Yung Pao, Pei-Zen Chang, Ping-Hei Chen, Kai-Hsiang Yen and Fu-Yuan Xiao (2004), “Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor,” SPIE International Symposium Photonic Europe－MEMS, MOEMS, and Micromachining, pp. 319-330, Strasbourg, France.
• Ying-Chou Cheng, Chi-Yuan Lee, Ching-Liang Dai, Wen-Jong Chen, Pei-Zen Chang and Ping-Hei Chen (2004), “Fabrication of micro-optical switch by post-CMOS micromachining process,” SPIE International Symposium Photonic Europe－MEMS, MOEMS, and Micromachining, pp. 274-283, Strasbourg, France.
• 李其源、張培仁、吳政忠、陳永裕、陳炳煇、黃家烈、龔育諄、莊志偉、謝箕烈 (2004)，“溼蝕刻石英晶片厚度即時監控之新穎方法”，中國機械工程學會第二十一屆全國學術研討會，pp. 6493-6498，高雄，台灣。
• 李其源、張培仁、吳政忠、陳永裕、陳炳煇、黃家烈、龔育諄、謝箕烈 (2004)，”濕蝕刻矽晶片厚度即時監控之新穎方法”，第八屆奈米工程暨微系統技術研討會，pp. 7a-4，新竹，台灣。
• S.Y. Pao, M.K. Chao, C.S. Lam and P.Z. Chang (2004), “An Efficient Numerical Method in Calculating the Electrical Impedance Different Modes of AT-Cut Quartz Crystal Resonator”, IEEE International Frequency Control Symposium and Exposition, pp.396-400, Montreal, Canada.
• S.Y. Pao, M.K. Chao, C.H, Chiu, C.S. Lam and P.Z. Chang (2005), “Beveling AT-cut Quartz Resonator Design by an Efficient Numerical Method”, IEEE Ultrasonics Symposium, pp.1848-1851, Rotterdam, Netherlands.
• Xuan-Yu Wang, Chi-Yuan Lee, Cheng-Jien Peng, and Pei-Zen Chang (2006), “The Micro-Fabrication Process of PZT Thick Film by Aerosol Deposition Method”, Nano/Micro Engineered and Molecular Systems 2006, pp. 1288-1291, Zhuhai, China.
• S.Y. Pao, M.K. Chao, Tim Wang, David Chang, C.S. Lam and P.Z. Chang (2006), “Parameters Extraction and Design Optimization for AT-cut Quartz Resonator based on Mindlin’s 2D Model”, IEEE International Frequency Control Symposium, pp.36-39, Miami, USA.
• 王宣又、李其源、彭成鑑、陳培元、張培仁 (2006)，”應用氣膠沈積法建立PZT厚膜微製程技術之研究"，第十屆奈米工程暨微系統技術研討會，pp. 3a-1，新竹，台灣。
• Xuan-Yu Wang, Chi-Yuan Lee, Cheng-Jien Peng, Pei-Yen Chen and Pei-Zen Chang (2006), “An IC Compatible PZT Thick Film Process”, International Manufacturing Leaders Forum 2006, L11-TW-FP118, Taipei, Taiwan.
  

• 張培仁、呂學士、黃榮堂 (2002)，微機電微波元件之研究，國家科學委員會專題研究計畫成果報告。
• 張培仁、呂學士、黃榮堂 (2002) ，微機電微波衰減器之研究，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2002) ，微陣列式磁性鐵心電感技術開發，台達電子工業股份有限公司研究計畫成果報告。
• 張培仁、呂學士 (2002)，以標準積體電路製程製作微波元件，國防基金會研究計畫成果報告。
• 李世光、張所鋐、林世明、張培仁等數人 (2002)，奈米科學與技術導論，經濟部工業局出版。
• 張培仁、呂學士、黃榮堂、林佑昇 (2003)，積體電路相容微機電系統之研究，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2003)，積體電路相容微機電關鍵技術之研究，國家科學委員會專題研究計畫成果報告。
• 丁志明、吳光鐘、吳政忠、張所鋐、李世光、張培仁等數人 (2003)，微機電系統技術與應用，精密儀器發展中心出版。
• 張培仁、呂學士、黃榮堂、林佑昇 (2004)，積體電路相容微機電系統之研究-總計畫(I)，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2004)，積體電路相容微機電系統之研究-子計畫四：積體電路相容微機電關鍵技術之研究(I)，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2004)，微機電電感與可變電容之整合與封裝，國防基金會研究計畫成果報告。
• 張培仁 (2004)，產學合作計畫：波動能量優化轉換之壓電變壓器系統開發(1/3)，國家科學委員會專題研究計畫成果報告。
• 張培仁、呂學士、黃榮堂、林佑昇 (2005)，積體電路相容微機電系統之研究-總計畫(I)，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2005)，積體電路相容微機電系統之研究-子計畫四：積體電路相容微機電關鍵技術之研究(II)，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2006)，無線生醫感測網路晶片系統--總計畫：無線生醫感測網路晶片系統(1/3)，國家科學委員會專題研究計畫成果報告。
• 張培仁 (2006)，無線生醫感測網路晶片系統--子計畫五：積體電路相容微波開關與薄膜體聲波濾波器之研究(1/3) ，國家科學委員會專題研究計畫成果報告。

  Patent

• 黃宗偉、張培仁、邱景宏、顏凱翔、陳宏璘(2002)，”以標準CMOS製程製作微機械式濾波器之方法及其成品”，中華民國專利發明第163094號。
• 邱景宏、林宗輝、張培仁、謝光宇 (2002) “微電感之製造方法及其構造”，中華民國專利發明第168011號。
• 張培仁、呂誌展、鄭英周(2003)，”量測材料卜松比的方法”，中華民國專利發明第174943號。
• 張培仁、黃榮堂、林弘萱(2003)，”微機電技術製作積體多頻通訊被動元件”，中華民國專利發明第174868號。
• 張培仁、鄭英周、李其源(2003)，”積體電路及其製作方法”，中華民國專利發明第193171號。
• 黃榮堂、李昇鴻、簡昭珩、張培仁 (2003)，”以標準積體電路製程製作微型開關”，中華民國專利發明第193588號。
• Pei-Zen Chang, Jung-Tang Huang, and Hung-Hsuan Lin, “Micro-Electromechnical Process For Fabrication of Integrated Multi-Frequency Communication Passive Components”, U.S. Patent No. 6,607,934 (August 19, 2003)
• 張培仁、李其源、吳政忠、陳永裕、鮑世勇、鄭英周、陳炳煇、顏凱翔(2004)，”濕蝕刻壓電材料之厚度即時監控方法”，中華民國專利發明第206714號。
• 張培仁、李其源、吳政忠、陳永裕、鄭英周、鮑世勇、陳炳煇、顏凱翔(2004)，”溼蝕刻矽薄膜之厚度即時監控方法”，中華民國專利發明第205260號。
• 林啟萬、李舒昇、黃振剛、李世光、張培仁、林世明(2004)，”改變表面漸逝波共振狀況之對稱與不對稱奈米複層膜結構”，中華民國專利發明第203961號。
• 季君炎、張培仁、王宣又(2004)，”表面聲波元件與積體電路之整合技術”，中華民國專利發明第201583號。
• 林啟萬、黃啟裕、邱志鵬、劉盈村、薛順成、郭德盛、黃榮山、張培仁、楊龍杰、吳造中、林世明、李世光 (2004)，”表面電漿子共振感測系統及方法”，中華民國專利發明第204996號。
• 黃榮堂、李承曄、簡昭珩、張培仁 (2004)，”高變化率的接觸型可變電感”，中華民國專利發明第I224344號。
• Chii-Wann Lin, Chen Kung Huang, Shiming Lin, Chih Kung Lee, Peizen Chang, ShuSheng Lee, “Repeated Structure of Nanometer Thin Films with Symmetric or Asymmetric Configuration for SPR Signal Modulation”, U.S. Patent No. 6,870,237 B1 (March 22, 2005)
• 張培仁、鄭英周、李其源 (2006)，”以半導體製程技術製作之微機電光學切換裝置及其製造方法”，中華民國專利發明第I255254號。
• 謝國煌、黃榮山、楊申語、王大銘、張培仁、張致遠、陳偉源 (2006)，”用於光電製程之微轉印方法”，中華民國專利發明第I252181號。
• 林啟萬、張培仁、趙福杉、楊燿州、王俊民 (2006)，”具有電極保護薄膜之生醫感測器及其製作方法”，中華民國專利發明第I262070號。
• 楊燿州，黃國修，林啟萬，楊龍杰，趙福杉，李世光，張培仁，黃瀅瑛 (2006)，” 微流體混合元件之類魚脊結構”，中華民國專利發明第M297788號。